Hydraulic Filter Support iron Epoxy Coated Mesh Low Carbon Steel

Hydraulic filter support epoxy coated mesh low carbon steel

Epoxy coated filter mesh Product introduction

Engineered with modified epoxy formulation and multi-layer composite filtration, specifically designed to resist highly corrosive agents (e.g., Hydrofluoric Acid/HF) in semiconductor fabrication. Integrates molecular-level sealing and acid-resistant materials to deliver leak-proof containment against acid vapors, particles, and chemical degradation in harsh wet processes.

Epoxy coated filter mesh core selling point

• Certified per ASTM D1308/F519; withstands long-term exposure to ≥49% HF solutions & mixed acid vapors
  Material volume swelling <0.1%, eliminating seal failure from acid penetration
• Complies with SEMI F57 ultra-pure fluid standards; metallic ion leaching ≤5ppb
  Nanoscale internal polish (Ra≤0.4μm) suppresses particle adhesion & wafer contamination
• Modular quick-disconnect ports enable seamless integration into FDA/UPW/Chemical delivery systems
  Built-in differential pressure sensing slots for visual filter life alert

Epoxy coated filter mesh Application areas

• Wet Etch Tools: Wafer HF/HNO₃ tank exhaust filtration and pipeline sealing
• Chemical Mechanical Polishing: Acid-Resistant Filters for Slurry Delivery Systems
• Ultra-high-purity chemical supply : Valve manifold box (VMB) acid vapor barrier unit
• Exhaust gas treatment system : Acidic exhaust gas pre-treatment filter module

Epoxy coated filter mesh Technical parameters

Epoxy coated filter mesh Product details